STSM Report Fabrication of Bio-inspired surfaces
نویسنده
چکیده
2.1 Fabrication of microstructures (silicon spikes) Single crystal n-type Si (1 0 0) wafers were subjected to laser irradiation in a vacuum chamber evacuated down to a residual pressure of 10 -2 mbar. A constant pressure of 500 Torr was maintained during the process through a precision micro valve system. The irradiating laser source was constituted by a regenerative amplified Ti:Sapphire (λ = 800 nm) delivering 190 fs pulses at a repetition rate of 1 kHz. The sample was mounted on a high-precision X–Y translation stage normal to the incident laser beam. Each micro-structured surface was fabricated at a constant fluence 0.34 J/cm 2 . Several samples were made with a variation on the spikes dimensions.
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